Thin films and thin-film structures

Dry box
(Labmaster 130, Mbraun)
Co-funder CoE Nanocenter

Flow box
(LFV 12, Iskra Pio)

Spin coater
(WS-400B-6NPP/LITE, Laurell)

UV light
(Lot Oriel Gruppe)

Furnace for rapid heating up to 1200 °C
(Mila 5000, Ulvac-Riko)

Furnaces for rapid heating up to 1000 °C
(LPT Thermprozess GmbH)

Inkjet printer for printing layered structures
(DMP-2831, Dimatix)
Co-funder CoE Nanocenter